(li)Դ^(gun) һlMEMSCϵy늶ta(chn)(xin)ڜʹϺӳg(sh)˾ÿծa(chn)_5f(wn)wǼtwӋĺ@I(y)ўȫ13(g)ʡеļtwӋS(chng)ṩ200f(wn)wؾoȱYa(chn)˾߀l(f)]a(chn)I(y)朻a(yu)f(xi)Ϻн(jng)ίُ7f(wn)֧~Ӌȼü֮ ҵĄ(chung )I(y)֮·ԴϺƄ(chung )ĽOͿƌW(xu)Ժӳӄ(chung )ʼпԺϺϵyоTxf(shu)20163x(chung )I(y)гɹDa(chn)ƷƄ(dng)(sh)F˟늼t⡰Їоȫa(chn)I(y)ɿ Ƽͮa(chn)I(y)Ó ҪСõļt~Ӌĺ늼tкܸߵļg(sh)xBwڃȵwl(f)t⾀(xin)ϵļtVƬxtⲨL(chng)ռt⾀(xin)ϵļtвٽMżӲ|вa(chn)늉ݔ(jin)֮@NܰѼtDQɟٰџDQĶʹOywضҪ_ɴDQľ_Ⱥ`g(sh)yȺܴ пԺϺϵyxg85x_(ki)ʼо늼t@òʿW(xu)λ^mоѰl(f)Փ100ƪՈl(f)(zhun)·DOӋ80@ЩՓĴl(f)SCIƌW(xu)ڿˇHͬP(gun)עȻr(sh)ț](mi)I(y)@Na(chn)twӋĺ(li)M(jn)ǵ䡱gձWğ늼tI(y)(yu)ȹ؛oY_YI(y)ЇꑵļtwӋS(chng)̱Пo(w) Ϻϵyğ늼tмg(sh)_HM(jn)ˮƽʲôȮa(chn)I(y)߀(hu )x˿Ƽͮa(chn)I(y)ÓҲo(chung )I(y)뷨Ȼ(chung )I(y)ĸL(fng)Uy¶Q x(chung )I(y) 20155ϺOƄ(chung )Ҋ(jin)22ll(f)һϵwƙCͻеʮһlxP(gun)עˆTɱP(gun)ϵx(chung )I(y)(chung )I(y)35ȷԭλgBmӋԭƸ(zhun)I(y)g(sh)(w)@(g)ƶȄ(chung )УԺˆTͶ턓(chung )I(y)·˄(chung )I(y)L(fng)U ˺пԺҲˆTx(chung )I(y)_(ki)˾G֧@NʽѿƼɹDF(sh)a(chn)2015xпԺϺϵyύx(chung )I(y)Ո@λƌW(xu)ҵĄ(chung )I(y)(mng)оI(lng)͇҂мg(sh)c(din)(sh)ҽo˴֧I(y)λZδ(li)35ȿԻ﹤о߀(chung )ğӳv(chung )Դ܂I(lng)(chung )I(y)Č(zhun)I(y)(w) mȻҎģС@ҡӲƼI(y)c(din)HCMOS-MEMSa댧wCϵyģʽ_(ki)չI(y)(w)@һN·ģʽxf(shu)҂˾µоƬOӋN(xio)a(chn)toȸصĴS(chng)@҂ͲԽS(chng)a(chn)ƷļԸ ![]() ѭ@NģʽӳcKؑcȵصоƬbS(chng)̽P(gun)ϵ@ϺI(y)ṩOӋDˇI(y)ؓ؟ba(chn)㲿(sh)F늼tȫa(chn)I(y)ɿYˇa(chn)twӋġȱоvʷ Їоָxf(shu)ˎOҪtwӋĜy_0.2z϶ӳӮa(chn)Ʒľ_0.10.05z϶`ȄtǺ뼉@a(chn)t~Ӌڴ˴СYl(f)͟ĿˆT [ι܊֧ο 鱩l(f)҂l(f)FϺ](mi)~Ӌa(chn)I(y)r(sh)(zh)Ϻн(jng)ίشba(chn)I(y)̎ؓ؟f(shu)҂յŲ(li)l(f)FϺаl(f)~ӋP(gun)II(y)cR^ӛ(lin)ϵF(chng)ָӳӏͮa(chn)S@I(y){ @Ԓ(hu)˟ӳӵġ[ι܊ҎģI(yng)ղЈ(chng)ϲI(y)yģµĺĸij(g)Ј(chng)ռI(lng)ȵλK~(y)SVݱȶa(chn)t~ӋĴI(y)(li)@ϺСI(y) l(f)һr(sh)M(jn)ڼtăr(ji)q_100Ҋ(jin)](mi)@ӵġ[ι܊I(y)ǵ䡱gtwӋS(chng)̵ğo(w)ο֕(hu )F Ϻ܂g(sh)ͮa(chn)I(y)c17ǰL(chng)l(f)չ˟ӳпԺϺϵyOϺg(sh)I(y)оԺgӾoаl(f)ҲȏS(chng)ṩ˔f(wn)wtضȂоƬcӳg(sh)ԺҲϺƄ(chung )ĽOƶȄ(chung )пίζ^֧ɞϺׂ(g)аl(f)cDƽ_g(sh)ԺСԽĦ8Ӣаl(f)ԇ(xin)鱩l(f)ˆT@lԇ(xin)Ƴ˼tضȂоƬ ԳֿƼ(chung )ºƶȄ(chung )¡p݆(dng)ՓČ(xi)ϡgxw(hu )@ЩָʾăȺ߀(hu )ϵy@(g)(wn)}ЦЦf(shu)ȥ˰˾l(f)չ^eҵĿһ(g)ƼI(y)¶ں͇֙CS(chng)̽Ǣϣџ늼tb֙CV֙CÑ(h)ܱݵyw |